Ultra-precise MEMS based Bio-sensors | Abstract
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European Journal of Applied Engineering and Scientific Research


Ultra-precise MEMS based Bio-sensors

Author(s): Vinayak Pachkawade

In recent years, there has been a growing interests in the development and implementation of innovative solutions in the form of a miniaturised bio-sensors. In this regard, in the MEMS community emphasis has been given to design and fabricate highly sensitive, miniaturised biosensors. These bio-sensors are used for detection and measurement of either single and/or multianalyte/s at lower cost, size, weight, and power consumption. This talk attempts to review the stateof-the art MEMS sensors used for bio sensing applications. A device architecture based on the array of weakly coupled micromechanical resonators are reported. Owing to the weak coupling between the resonating elements in an array make these devices ultra-high sensitive to analytes/biomolecules. Due to the highly-precise output of such bio-sensors, resolution in the range of sub-actogram is also possible using such devices. Furthermore, role of these new class of MEMS resonant biosensors operating at ambient temperature and/or pressure is also studied